电导率可调的MoS2薄膜的制备与研究任务书
2020-04-29 19:55:50
1. 毕业设计(论文)的内容和要求
本课题拟通过金属掺杂、等离子掺杂、表界面处理等技术对PLD制备的MoS2进行处理,以调控MoS2薄膜的电导率、载流子浓度等参数。
使其适用于NCFET的沟道层。
2. 参考文献
1. Mingxu Fang Fang Wang Yemei Han Yulin Feng Tianling Ren Yue Li Dengxuan Tang Zhitang Song Kailiang Zhang, https://doi.org/10.1002/aelm.201700524. 2. Yen-Teng Ho, Chun-Hao Ma, Tien-Tung Luong, Lin-Lung Wei, Tzu-Chun Yen, Wei-Ting Hsu, Wen-Hao Chang, Yung-Ching Chu, Yung-Yi Tu, Krishna Prasad Pande, and Edward Yi Chang, Phys. Status Solidi RRL 9, No. 3, 187#8211;191 (2015) / DOI 10.1002/pssr.201409561. 3. Barvat, Arun, Prakash, Nisha, et. al., DOI: 10.1063/1.4991490. 4. Martha I. Serna Salvador Moreno Marissa Higgins Hyunjoo Choi Majid Minary‐Jolandan Manuel A. Quevedo‐Lopez, https://doi.org/10.1002/pssc.201600091. 5. Dattatray J. Late, Parvez A. Shaikh, Ruchita Khare, Ranjit V. Kashid, Minakshi Chaudhary, Mahendra A. More, and Satishchandra B. Ogale, dx.doi.org/10.1021/am503464h| ACS Appl. Mater. Interfaces 2014, 6, 15881#8722;15888. 6. Yen-Teng Ho ; Tzu-Chun Yen ; Tien-Tung Luong, et. al., DOI: 10.1109/CSTIC.2016.7464088.
3. 毕业设计(论文)进程安排
2018.12-2019.02,文献调研,翻译,开题报告; 2019.03-2019.04,薄膜制备、表征、分析工作; 2019.05-2019.06,论文撰写,答辩。